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Environmental Health &
Safety Products
Being a champion of the environment, FSI International designs
products and processes with Environmental Health & Safety
concerns in mind. While reducing environmental impact, these solutions
also reduce cost-of-ownership (COO) at the same time, through
reduction of water and chemical usage. Furthermore, some of these
solutions also improve performance and productivity.
Some Notable Environmental Health and Safety Solutions
- Ozone process, available on the MAGELLAN® Immersion Cleaning System and the ZETA® Spray Cleaning Systems, uses ozonated water to replace
chemicals for FEOL photoresist removal, FEOL post-ash
clean, and critical clean applications.
- CryoKinetic process, available on the
ANTARES® CX Advanced
Cleaning System, is an all-dry process using inert gases
frozen at cryogenic temperatures. The CryoKinetic process
effectively replaces scrubber technology, which uses large
amounts of water and sometimes requires wet chemicals
too.
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Click on MAGELLAN® photo for more
info
Click on ZETA® photo for more
info
Click on ANTARES® photo for more
info
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