About TEL FSI
TEL FSI, Inc. is a global supplier of wafer cleaning equipment, technologies and support services to the integrated circuit (IC) and microelectronics industry.
We offer a complete portfolio of single wafer and batch products for immersion, spray, and cryogenic cleaning technology applications tailored to the unique requirements of our customers. Through close customer collaboration, TEL FSI enables manufacturers to lower their overall manufacturing costs and migrate to the next technology generation.
News & Events
Tokyo Electron Limited Completes Acquisition of FSI International, Inc.
Tokyo, Japan (October 11, 2012)
Tokyo Electron to Acquire FSI International
Tokyo, and Chaska, MN (August 13, 2012)
FSI International Announces Third Quarter and First Nine Months Fiscal 2012 Financial Results
MINNEAPOLIS (June 19, 2012)
FSI International Receives Orders for its ANTARES® Systems from Several Leading Device Manufacturers
MINNEAPOLIS (April 20, 2012)
FSI International Receives a Follow-on Order for Multiple ANTARES® Systems from a Leading Global Device Manufacturer
MINNEAPOLIS (March 6, 2012)