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MERCURY® Spray Cleaning System

MERCURY® Spray Cleaning Systems

The MERCURY® Spray Cleaning Systems provides IC manufacturers with economical front-end-of-line cleaning processes to the 90nm node and beyond. This semi-automated batch spray processor is designed wafer sizes up to 200mm. With over 1,000 MERCURY® batch-spray cleaning systems shipped, they continue to meet the needs of low cost IC manufacturing worldwide.

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