TEL FSI, Inc. has a 35-year history in the semiconductor industry and as a result, there is a large installed base of TEL FSI equipment throughout the world. TEL FSI has a variety of programs in place to directly support this legacy equipment or can provide direction to third parties supporting select legacy products. For information relating to systems, spares and service support for TEL FSI products not found on this website, please contact your local TEL FSI account manager or please complete the Request More Information form.