Applications & Products

Request for Upgrade Information

Fields marked with an asterisk (*) are required.

Tool Type:

ANTARES® Cryokinetic Cleaning System
MAGELLAN® Immersion Cleaning System
MERCURY® Spray Cleaning System
ORION® Single Wafer Cleaning System
ZETA® Spray Cleaning System
POLARIS® Microlithography Cluster

* Application being run on the tool to be upgraded:


* Desired effect of Upgrade:

Reliability Improvement
Node Shrink
Process Improvement
Other (Please provide detail in the box below)

Detail:

 


* First Name
* Last Name
* Company Name
* Country
Phone Number
* Email
Comment/Question


 

 

 

 

Products Wafer Size (mm) Applications
    FEOL Critical Clean & Etch FEOL All-Wet Resist Strip & Clean Silicide Metal Strip BEOL Strip & Clean Particle/Defect Removal Resist Processing
ORION®
Single Wafer Cleaning System		 300            
ANTARES®
Single Wafer Cryokinetic System		 200/
300		            
ZETA®
Batch Spray System		 200/
300		            
ZETA®
Semi-Auto Batch Spray System		 ≤200            
MERCURY®
Semi-Auto Batch Spray System		 ≤200            
MAGELLAN®
Batch Immersion System		 200/
300		            
POLARIS®
Micro Lithography Cluster		 N/A            

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