Applications & Products

ZETA® System Upgrades

FSI has a history of continuously improving equipment design and process to offer the customer base increased performance and higher reliability. We strive to make as many of the improvements compatible with the earliest vintage equipment to maximize your investment. If you are interested in any of the following upgrades and would like more information, please check the appropriate box(s) and submit your request. An FSI representative will get back to you promptly.

Fields marked with an asterisk (*) are required.

CPU Memory Upgrade: Enables software upgrade to Version 13.

Dual Arm Wafer End Effector Upgrade: Increases throughput and handling reliability.

FlashClean™ Upgrade Kit: Enables hot chamber rinsing and dispense aspiration leading to improved drying and lower defectivity.

Labryinth Seal Upgrade: Improves system reliability.

Process Exhaust Ball Valve Upgrade Kit: Improves exhaust sealing, eliminates salt build up and improves exhaust flow.

Robot Exchange Program: Provides a low cost refurbished robot exchange program.

Version 14 Software Upgrade: New release provides multiple product enhancements and software bug fixes.

ViPR™ Process 3.1 Upgrade: Increases strip rate and reduces process time resulting in reduced chemical consumption and increased throughput. Lowers and improves material losses.

Turntable Hoist Upgrade: The ZETA® System Turntable Hoist is now available in a Field Upgrade Kit. The kit contains all of the necessary components to install the hoist at a customer site.

Ultra Low Flow Upgrade: Extends chemical flow range down to 3 to 30 ml/min which enables higher chemistry dilution and lower chemical consumption.


 


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Products Wafer Size (mm) Applications
    FEOL Critical Clean & Etch FEOL All-Wet Resist Strip & Clean Silicide Metal Strip BEOL Strip & Clean Particle/Defect Removal Resist Processing
ORION®
Single Wafer Cleaning System
300            
ANTARES®
Single Wafer Cryokinetic System
200/
300
           
ZETA®
Batch Spray System
200/
300
           
ZETA®
Semi-Auto Batch Spray System
≤200            
MERCURY®
Semi-Auto Batch Spray System
≤200            
MAGELLAN®
Batch Immersion System
200/
300
           
POLARIS®
Micro Lithography Cluster
N/A