Applications & Products

MERCURY® System Upgrades

FSI has a history of continuously improving equipment design and process to offer the customer base increased performance and higher reliability. We strive to make as many of the improvements compatible with the earliest vintage equipment to maximize your investment. If you are interested in any of the following upgrades and would like more information, please check the appropriate box(s) and submit your request. An FSI representative will get back to you promptly.

Fields marked with an asterisk (*) are required.

IR Heater Field Upgrade: Provides MERCURY® system users an infra-red chemical heating system to boost chemical mixtures to as much as 120°C.

Smoke Detector Upgrade: Enables compliance to full CE requirements.

Versa-Logic 586 CPU Upgrade: Provides a replacement controller unit to replace obsolete 286 & 486 based systems.

Ultra Low Flow NT Pickup Upgrade: Extends chemical flow range down to 15 to 150 ml/min or 30 to 300 ml/min which enables higher chemistry dilution and lower chemical consumption.

Dual Exhaust Upgrade: Reduces formation of ammonium chloride salts in the process chamber exhaust in systems using RCA chemistries.


 


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Products Wafer Size (mm) Applications
    FEOL Critical Clean & Etch FEOL All-Wet Resist Strip & Clean Silicide Metal Strip BEOL Strip & Clean Particle/Defect Removal Resist Processing
ORION®
Single Wafer Cleaning System		 300            
ANTARES®
Single Wafer Cryokinetic System		 200/
300		            
ZETA®
Batch Spray System		 200/
300		            
ZETA®
Semi-Auto Batch Spray System		 ≤200            
MERCURY®
Semi-Auto Batch Spray System		 ≤200            
MAGELLAN®
Batch Immersion System		 200/
300		            
POLARIS®
Micro Lithography Cluster		 N/A            

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