System Enhancements

System Enhancements

ANTARES® System Upgrades

FSI has a history of continuously improving equipment design and process to offer the customer base increased performance and higher reliability. We strive to make as many of the improvements compatible with the earliest vintage equipment to maximize your investment. If you are interested in any of the following upgrades and would like more information, please check the appropriate box(s) and submit your request. An FSI representative will get back to you promptly.

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Mechanically Actuated Edge Grip Chuck Upgrade: Eliminates vacuum grip backside particulate and improves throughput.

Software upgrade Version 9: Enables multiple new system enhancements such as auto leak detect upgrade and improves defectivity.

Automatic Dewar Drain Upgrade: Automates and simplifies the routine dewar drain process, no mechanical intervention required.

Auto Leak-Up Detection Upgrade: Improves system reliability by enabling routine (programmable) system leak checking.

Auto Leak-Up Upgrade: Improves the vacuum sensing accuracy.

Chamber Purge Upgrade: Improves defectivity in higher humidity fab environments.


 


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