| Products | Wafer Size (mm) | Applications | |||||
| FEOL Critical Clean & Etch | FEOL All-Wet Resist Strip & Clean | Silicide Metal Strip | BEOL Strip & Clean | Particle/Defect Removal | Resist Processing | ||
|---|---|---|---|---|---|---|---|
|
ORION™ Single Wafer Cleaning System |
300 | ||||||
|
ANTARES™ Single Wafer Cryokinetic System |
200/ 300 |
||||||
|
ZETA™ Batch Spray System |
200/ 300 |
||||||
|
ZETA™ Semi-Auto Batch Spray System |
≤200 | ||||||
|
MERCURY™ Semi-Auto Batch Spray System |
≤200 | ||||||
Applications |
Products |
TEL FSI offers a range of product and process enhancements to extend the life of installed equipment and enable TEL FSI equipment to run new processes. Learn more about current product enhancement programs and how to maximize return on investments. If you are interested in any of the following upgrades and would like more information, please select the product and check the appropriate box(s) to submit your request. A TEL FSI representative will get back to you promptly.
