ZETA™ 200 Semi-Auto is surface conditioning solution for both 150 and 200mm fabs and can be configured with ViPR™ technology to address the unique requirements of advanced resist and metal silicide stripping. This system with manual loading capability processes multiple product lots simultaneously and can be configured with up to 8 different chemical inputs. This offers the flexibility to blend standard mixes or change mix ratios and temperatures within a recipe.
Benefits
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- Eliminates ashers
- Highest selectivity silicide strip process
- Lowest residual metal contamination
- Enables low temperature annealing for nickel platinum silicide formation
- High productivity and low material loss
- Reduced cycle time (eliminates 2-step ash/wet-strip process)
