ZETA® 300 is a fully-automated surface conditioning solution for advanced 300mm fabs. The system is available with ViPR™ technology to address the unique requirements of advanced resist and metal silicide stripping. ZETA 300 features up to 4 FOUP load ports and processes up to 2 product lots at a time. It can be configured with up to 8 different chemical inputs and offers the flexibility to blend chemicals or change mix ratios and temperatures within a recipe to achieve the desired result.
ZETA® Batch Spray System ZETA® 200 Batch
Benefits
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- Eliminates ashers
- Highest selectivity silicide strip process
- Lowest residual metal contamination
- Enables low temperature annealing for nickel platinum silicide formation
- High productivity and low material loss
- Reduced cycle time (eliminates 2-step ash/wet-strip process)
