Applications
MAGELLAN® is fully automated immersion cleaning system designed for 200 or 300mm wafers capable of performing multiple cleans including critical cleans and etch. Proven FSI technology ensures lowest defectivity and uniform processes. The modular design permits easy upgrades in the field making it a highly flexible cleaning system.
BENEFITS
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- Lowest defectivity
- Most uniform etching with FSI SymFlow® technology
- Minimizes capital investment as a result of configurable and extendible design
- Field expandable with additional modules and flow streams
- Proven IPA rinse/dry method using FSI STG® technology
- High particle removal efficiency with shadow-free megasonics and proprietary rinsing techniques
- Fast cycle time
