Find the Right Solution

		FEOL Critical Clean & Etch
Products	Wafer Size (mm)	Applications
ORION® Single Wafer Cleaning System	300
ANTARES® Single Wafer Cryokinetic System	200/ 300
ZETA® Batch Spray System	200/ 300
ZETA® Semi-Auto Batch Spray System	≤200
MERCURY® Semi-Auto Batch Spray System	≤200
MAGELLAN® Batch Immersion System	200/ 300
POLARIS® Micro Lithography Cluster	N/A

Applications

Products

News & Events

2012 2011 2010 2009 2008

FSI International Receives Repeat Order for POLARIS® Photolithography System from a Gallium Arsenide Foundry

FSI experiences continued growth in broadband wireless and wireline communications market

MINNEAPOLIS (November 19, 2008) — FSI International, Inc. (Nasdaq: FSII) a leading supplier of surface conditioning and microlithography equipment for microelectronics manufacturing, announced today that it has received a repeat order for a POLARIS^® Microlithography System from a leading gallium arsenide (GaAs) device foundry.

The purchase represents a growing trend of GaAs customers who select POLARIS as their tool of choice due to superior performance and flexibility coupled with 15 years of experience with delicate GaAs substrates.

"We are experiencing increased POLARIS system interest from the rapidly growing broadband wireless and wireline communications component manufacturers,” stated Don Mitchell, FSI’s chairman and CEO. “Our POLARIS product’s flexibility allows our customers to process GaAs and gallium nitride (GaN) substrates in multiple sizes within the same system with no hardware or software changes. The ability to process multiple wafer sizes simultaneously provides a greater degree of flexibility without compromising process performance.”

Orders within the broadband wireless and wireline communications device suppliers are expected to increase, with FSI placing emphasis on continued expansion into this key market.

FSI POLARIS microlithography systems provide adhesion and resist coating, as well as baking, chilling and developing processes for wafer sizes between 100mm and 300mm. With a large installed base, POLARIS systems already serve many applications and industries, including thin film head, medical and GaAs. In addition, the company's support services provide product and process enhancements to extend the life of installed FSI equipment, enabling worldwide customers to realize a higher return on their capital investment.

FSI International, Inc. is a global supplier of surface conditioning equipment, technology and support services for microelectronics manufacturing. Using the Company’s broad portfolio of cleaning products, which include batch and single wafer platforms for immersion, spray, vapor and CryoKinetic technologies, customers are able to achieve their process performance, flexibility and productivity goals. The Company’s support services programs provide product and process enhancements to extend the life of installed FSI equipment, enabling worldwide customers to realize a higher return on their capital investment. For more information, visit FSI’s website at http://www.fsi-intl.com.