When: March 31 - April 2, 2008
Where: Sheraton Austin Hotel, Austin, Texas

Dr. Jeff Butterbaugh, FSI International chief technologist and ITRS FEP co-chair, will give an invited presentation entitled “ITRS 2007 Front End Processes – The End of Traditional Transistor Scaling – The Beginning of New Materials and New Structures”

During a short course, held on the first day of the conference, Butterbaugh will be discussing wet cleaning, rinsing and drying, and cryogenic aerosol cleaning in his lecture: “Basic and Advanced Topics of Surface Conditioning and Cleaning Processing for Integrated Circuit Manufacturing.”

In addition, as an Executive Sponsor, FSI will be co-hosting a breakfast roundtable discussion with a small group of IC manufacturing attendees on the future challenges of surface preparation.

Visit the SEMATECH website for more information on the conference.