(This paper was co-authored by Jerry O’Dwyer, FSI Europe director of product management, and Antonio Truscello, FSI senior applications engineer.) The paper focused on how improvements in wet cleaning can lead to increased yield. FSI customer fab data using the cobalt salicide selective etch process in FSI spray tools resulted in a two percent yield improvement when compared to wet benches.

Charles Lin speaking at seminar.	Charles Lin participating in the panel discussion.