Find the Right Solution

		FEOL Critical Clean & Etch
Products	Wafer Size (mm)	Applications
ORION® Single Wafer Cleaning System	300
ANTARES® Single Wafer Cryokinetic System	200/ 300
ZETA® Batch Spray System	200/ 300
ZETA® Semi-Auto Batch Spray System	≤200
MERCURY® Semi-Auto Batch Spray System	≤200
MAGELLAN® Batch Immersion System	200/ 300
POLARIS® Micro Lithography Cluster	N/A

Applications

Products

News & Events

FSI Knowledge Services Seminar Series -- UK, Germany, France and Israel – HOLD THE DATE

Hold the date for a seminar near you – FSI will be holding its next Knowledge Services Seminar Series in the following locations:

17 October – Near Manchester, England
19 October – In Dresden, Germany
23 October – Israel -- New location added for 2006
25 October – Near Grenoble, France

The daily agenda will include a morning short course on the "Fundamentals of Surface Characterization” and an afternoon of presentations on what’s driving the semiconductor industry and surface conditioning strategies for 65nm and beyond.

To view more information on the FSI Knowledge Services™ Seminar Series, click here