Visit the *m•FSI booth in Hall 4A-505, Makuhari Messe, during SEMICON Japan December 6-8, 2006. m•FSI will be hosting mini-technical seminars in the booth everyday. For more information on SEMICON Japan 2006, please visit the SEMI website. (http://www.semi.org/)
During the December 7, Session 3 of the SEMI Technology Symposium (STS) on Multi-Level Interconnection & Etching, m•FSI’s Kenichi Itoi, business coordinator for FSI products, will be presenting the paper “Cryogenic Aerosol Technology for Advanced Cu/Low-k Cleaning.” For more information on this topic, click here.
*m•FSI is FSI International’s Japanese joint venture. m•FSI supports the Japan market with its own engineering, development, sales and marketing, and customer service departments.

