Asia FSI Knowledge Services™ Seminar Series
The FSI Asia Knowledge Services™ Seminar Series was held in Seoul, Singapore, Shanghai, Hsinchu and Tainan during the weeks of April 9 and 16, 2007. Over 400 customers participated in this highly rated seminar series.
Below is a list of presentation topics. To request a CD of the FSI Asia Knowledge Services™ Seminar presentations, click here.
Short Course
- “Fundamentals of Particle Adhesion and Removal” – taught by Dr. Stephen P. Beaudoin, Professor of Chemical Engineering, Purdue University and Dr. Srini Raghavan, Professor of Materials Science and Engineering, Univeristy of Arizona
ANTARES® CryoKinetic System
- “FSI ANTARES® CryoKinetic Cleaning System Product Overview”
- “FSI ANTARES® CryoKinetic Cleaning - Applications for 90nm and Beyond” – Lingzhi Tan, Chartered
- “Interconnect Yield Enhancement with the Cryogenic Aerosol Process”
MAGELLAN® Immersion Cleaning System
- “FSI MAGELLAN® Immersion Cleaning System Product Overview”
- “Achieving Ultra-Low Defectivity in Immersion Processing”
ZETA® Spray Cleaning System
- “FSI ZETA® Spray Cleaning System Product Overview”
- “All Wet PR Strip Process with High Temperature SPM Technology” – Kwang Wook Lee, Samsung
- “All-Wet Stripping of Implanted Photoresist”
- “Applications of Batch Spray Processing for Ni Selective Etch for Salicide Formation”
- “Metal Stripping for NiPt Salicide Formation”
- “ZETA® System Upgrades for All-Wet Photoresist Stripping”
Other Topics
- “Challenges and Solutions in Surface Preparation”
- “A Study of PR Strip Method induced Bit Line Contact Resistance Variation” – Gyu Hyun Kim, Hynix
- “Contaminant Particle Control for 45nm-level Process and Beyond” – Taesung Kim, Sung Kyun Kwan University
- “The State of the Semiconductor Industry” – Philip Koh, Gartner-Dataquest
- “Wet Process Challenges for CMOS Foundry” – Minhwa Chi, SMIC