FSI is committed to helping customers achieve their cost, yield and device performance goals while maximizing the return on their capital investments in surface conditioning technologies.
FSI’s multi-level service and support resources are available through the company’s global customer support network. FSI offices around the world are staffed by highly trained, responsive, dedicated product and process experts – all backed by the experience and expertise of the Chaska, Minnesota, USA headquarters’ staff and a Class 1 development lab.
Combining global insight with local support and an unflagging commitment to customer success makes FSI more than able to meet customers’ service and support needs.
Emergency
For emergency service problems, please use the following numbers:
Surface Conditioning Products
Domestic: (877) 723-8324
Intl: (952) 361-8188
POLARIS® Systems and Services Products
Domestic: (888) 374-4685
Intl: (972) 643-5678
Spare Parts
Domestic: (800) 477-3744
Intl: (952) 448-1085
Technical Support
Surface Conditioning Products:
Domestic: (877) 723-8324
Intl: (952) 361-8188
POLARIS® Systems and Services Products
Domestic: (888) 374-4685
Intl: (972) 643-5678
Request more information about FSI Technical Training.
ANTARES®
ANTARES® CX Advanced Cleaning System Maintenance
MERCURY®
MERCURY® MP Spray Cleaning System Maintenance
MERCURY® Spray Cleaning System Process Seminar
ZETA®
ZETA® Spray Cleaning System Process Seminar
ZETA® Spray Cleaning System Maintenance – 200 or 300
ZETA® Spray Cleaning System Material Handling Module (MHM) 300mm Maintenance
More than 25 years ago FSI realized the importance of advanced applications development and established one of the industry’s first equipment supplier-based laboratories. Today FSI International operates a state-of-the-art process lab in a Class 1 clean room at its Chaska, Minnesota, USA headquarters. Its leading-edge capabilities are a testimony to FSI’s technology leadership and customer partnering philosophy. This proven facility offers IC makers distinct advantages:
- Reduced development time
- Improved production readiness by pre-qualifying processes
- Optimized in-field implementation
The FSI advanced process lab supports the company’s network of global in-field application engineers to facilitate faster return on IC manufactures’ tool investments. The FSI global applications group optimizes process in the field and works best-known methods into process flows at customers’ fabs. This enables them to ramp new processes quickly, reducing time from receipt of tool to producing products.
Applications Laboratory Clean Room
- 100% HEPA Filters
- Class 1: 6500 square feet
- Class 10: 2000 square feet
- 30-Point Continuous Airborne Particle Monitoring to 10nm particle size
Complete line of FSI surface conditioning products in-house metrology equipment:
- SEM
- Particle counter
- Ellipsometer
- Four-point probe
SPC particle tracking 90nm and 60nm
- 2002-2003: 90nm (already implemented)
- 2004-2005: 60nm (projected; gauge studies and preliminary tracking already in progress)
To request an experiment for the FSI Applications Laboratory, please contact your local FSI account representative or click below to complete the General Information Request form.