Find the Right Solution

		FEOL Critical Clean & Etch
Products	Wafer Size (mm)	Applications
ORION® Single Wafer Cleaning System	300
ANTARES® Single Wafer Cryokinetic System	200/ 300
ZETA® Batch Spray System	200/ 300
ZETA® Semi-Auto Batch Spray System	≤200
MERCURY® Semi-Auto Batch Spray System	≤200
MAGELLAN® Batch Immersion System	200/ 300
POLARIS® Micro Lithography Cluster	N/A

Applications

Products

Customer Support

Course Length

5 days (at FSI's Chaska, Minnesota facility)

Class Size

Maximum of 6 students

Target Audience

Equipment maintenance technicians

Course Prerequisites

Basic knowledge from one year of experience or education in the following areas:

Electronics (AC/DC circuits)
Mechanics
Computer software navigation
Ability to read electrical and pneumatic schematics
Chemical safety training in a fab environment
Familiarity with cleanroom procedures
Fluency in English
Understanding of MSDS forms

Course Objectives

Upon the successful completion of the MERCURY^® System course, attendee will be able to:

Locate procedures and specifications for the MERCURY^® System in the operation and maintenance manual, supplementary training package and designated prints
Perform operational control functions
Describe necessary periodic maintenance service for the system
Analyze and locate functional problems in the MERCURY^® System
Perform corrective action on functional problems
Identify certain possible process problems

Course Description

The purpose of this maintenance course is to familiarize technicians with the theory, operation, calibration and service procedures for the MERCURY^® System, including:

Safety
Chemical flow systems
Motor system
Drain system
Process chamber
Electronics console
Chemical canister console

The class uses a fully operational MERCURY^® System in a cleanroom environment to demonstrate machine operation and provide realistic hands-on training and troubleshooting of the tool.

Documentation includes:

Operation and maintenance manual
Supplementary training package
Designated prints

This instructor-led course provides technicians with an opportunity to acquire knowledge through lecture and equipment hands-on time.

Registration and Cancellation Policies

Registration:

Accepted on a first-come, first-served basis
Paid via a Purchase Order number, training credits or a combination of both
Made by calling 952.448.8025, filling out the On-Line Registration Request Form or e-mailing This e-mail address is being protected from spambots. You need JavaScript enabled to view it

Cancellation:

If cancellation is made by:

15 business days: no fee
11—15 business days: 25%
10 or less business days: 50%
No cancellation (no show): 100%

Note: A minimum class size of four is required to hold a class. FSI reserves the right to cancel classes that do not meet the minimum size requirement and to reschedule attendees into the next available class. The attendee will be responsible for any costs due to travel arrangement changes/cancellations. Notifications of cancellations/changes will be made at least two weeks prior to start date.

General Information:

Training is conducted in Chaska, Minnesota unless otherwise noted.
Classes start promptly at 9:00 a.m. CST and end at approximately 5:00 p.m. CST.
Credits purchased with system orders expire after the warranty period (approximately one year from date of shipment).
Prices for all courses include training materials.
Instruction of classes is presented in English.