Asia FSI Knowledge Services™ Seminar Series

The FSI Asia Knowledge Services™ Seminar Series was held in Seoul, Singapore, Shanghai, Hsinchu and Tainan during the weeks of April 9 and 16. Over 400 customers participated in this highly rated seminar series.

Below is a list of presentation topics. To request a CD of the FSI Asia Knowledge Services™ Seminar presentations, click here.

Short Course:

• “Fundamentals of Particle Adhesion and Removal” – taught by Dr. Stephen P. Beaudoin, Professor of Chemical Engineering, Purdue University and Dr. Srini Raghavan, Professor of Materials Science and Engineering, Univeristy of Arizona

ANTATRES® CryoKinetic System:

• “FSI ANTARES® CryoKinetic Cleaning System Product Overview”
• “FSI ANTARES® CryoKinetic Cleaning - Applications for 90nm and Beyond” – Lingzhi Tan, Chartered
• “Interconnect Yield Enhancement with the Cryogenic Aerosol Process”

MAGELLAN® Immersion Cleaning System

• “FSI MAGELLAN® Immersion Cleaning System Product Overview”
• “Achieving Ultra-Low Defectivity in Immersion Processing”

ZETA® Spray Cleaning System

• “FSI ZETA® Spray Cleaning System Product Overview”
• “All Wet PR Strip Process with High Temperature SPM Technology” – Kwang Wook Lee, Samsung
• “All-Wet Stripping of Implanted Photoresist”
• “Applications of Batch Spray Processing for Ni Selective Etch for Salicide Formation”
• “Metal Stripping for NiPt Salicide Formation”
• “ZETA® System Enhancements for All-Wet Photoresist Stripping”

Other Topics

• “Challenges and Solutions in Surface Preparation”
• “A Study of PR Strip Method induced Bit Line Contact Resistance Variation” – Gyu Hyun Kim, Hynix
• “Contaminant Particle Control for 45nm-level Process and Beyond” – Taesung Kim, Sung Kyun Kwan University
• “The State of the Semiconductor Industry” – Philip Koh, Gartner-Dataquest
• “Wet Process Challenges for CMOS Foundry” – Minhwa Chi, SMIC