EMEA FSI Knowledge Services™ Seminar Series

The FSI EMEA Knowledge Services™ Seminar Series was held in Tel Aviv, Milan, Grenoble and Dresden during the weeks of May 12 and 19, 2008. Over 300 customers participated in this highly rated seminar series.

Below is a list of presentation topics. To request a CD of the FSI EMEA Knowledge Services™ Seminar presentations, click here.

Short Course:

• "Cleaning Chemistry Compatibility with New IC Device Materials" taught by Dr. Srini Raghavan, Professor of Materials Science and Engineering, University of Arizona

ANTATRES® CryoKinetic System:

• “Cryogenic Aerosol Processes for Memory Manufacturing” – Dr. Marc Petri (Qimonda)
• “Cryogenic Aerosol Processes for Yield Enhancement

MAGELLAN® Immersion Cleaning System

• “Drying Impact on Surfaces for Next Technologies Through Direct Bonding Investigation” – Yannick Le Tiec (Leti)
• “Yield Improvement Using MAGELLAN® System’s Flexibility to Achieve Recipe Optimiation – Nirit Sofer (Numonyx)

ZETA® Spray Cleaning System

• “Evaluation of the ZETA® System ViPR Process for All-Wet PR Strip in 200mm Manufacturing” – Y. Boroshok (Tower Semiconductor)
• “Influence of Dry Ashing and Wet Treatments on NVM Metal Gate Structures” – Enrico Bellandi (Numonyx)
• “Optimization of SPM-SC1 Based Cobalt Salicide Selective Etching” – Enrico Bellandi (Numonyx)
• “WET Selective Etch for NiPt Silicide: Challenges and Solutions” – Stephane Zoll (STMicroelectronics)
• “Steam-Injected SPM for High Performance Ash-Free All-Wet Photoresist Stripping”
• “FSI ZETA® System for In-House Wafer Reclaim”

Other Topics

• “Cleaning Challenges for DRAM Manufacturing” – Kristin Schupke (Qimonda)
• “Technologies for 3D-IC Integration” – Laurent Clavelier (Leti)
• “Trends and Cleaning Challenges in Non-Volatile Memory Technology” – Mauro Alessandri (Numonyx)
• “Drivers for Low Material Loss PR Stripping and Cleaning”
• “Evolution of Salicide”
• “FSI International – Corporate Overview and Product Introductions”