FSI Knowledge Services™ Seminar Series

Seminar Agenda

These sessions are FREE to all attendees!


DRESDEN, GERMANY : 22 MAY 2008

 

8:00 to 8:30

Morning Registration and Refreshments

8:30 to 8:40

Welcome/Introduction - FSI International

Session I
Short Course

8:40 to 10:40

Short Course: Cleaning Chemistry Compatibility with New IC Device Materials taught by Professor Srini Raghavan, Professor of Materials Science and Engineering, University of Arizona

 

10:40 to 11:00

Refreshment Break


Session II
Technical Seminar

Surface Conditioning Industry Drivers, Challenges and Solutions


11:00 to 11:30

FSI Corporate and Product Overview - FSI International

 

11:30 to 12:00

Cleaning Challenges for DRAM Manufacturing - Qimonda

 

12:00 to 12:20

Steam-Injected SPM for High Performance Ash-Free All Wet Photoresist Stripping - FSI Inernational

12:20 to 13:50

Lunch and Afternoon Registration

 

13:50 - 14:00

Evolution of Salicide - FSI International

 

14:00 - 14:20

NiPt Stripping for Salicide Formation - STMicroelectronics

 

14:20 - 14:40

FSI Single Wafer Cleaning System Overview - FSI International

 

14:40 - 15:10

Cu/low-k Challenges and Cleaning Process Development for 32nm/22nm Logic Technology - FSI International

 

15:10 - 15:30

Cryogenic Aerosol Processes - Qimonda

 

15:30 - 15:50

Refreshment Break

 

15:50 - 16:10

Immersion Cleaning - FSI International

 

16:10 - 16:30

ZETA® System for In-House Wafer Reclaim - FSI International

 

16:30

Adjourn

 

 

 

Seminar Registration

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Event Information

(Please check each event you will attend)

Will Attend:

Session, Time and Description:

8:00 to 11:00
Session I of FSI's Knowledge Services™ Seminar Series
Short Course: Cleaning Chemistry Compatibility with New IC Device Materials
Taught by Dr. Srini Raghavan, Professor of Materials Science and Engineering, University of Arizona

11:00 to 16:30
Session II of FSI's Knowledge Services™ Seminar Series
Surface Conditioning Industry Drivers, Challenges and Solutions,
FSI and invited presentations

Seminar Location and Hotel Accomodations

Maritim Hotel and Internationales Congress Center Dresden

Ostra-Ufer 2/Devrientstrabe 10-12, 01067 Dresden, Germany

 

To view the venue, click here.

 

Please contact the hotel directly if you need to reserve a hotel room.

 

Other Information

Special needs (Diet/Medical/Other):

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Conference Materials

All conference attendees will receive a binder of conference materials at the seminar.

If you have additional questions, please contact Mary Olson at:
mary.olson@fsi-intl.com.