FSI Knowledge Services™ Seminar Series

Seminar Agenda

These sessions are FREE to all attendees!


GRENOBLE, FRANCE : 20 MAY 2008

 

8:00 to 8:30

Morning Registration and Refreshments

8:30 to 8:40

Welcome/Introduction - FSI International

Session I
Short Course

8:40 to 10:40

Short Course: Cleaning Chemistry Compatibility with New IC Device Materials taught by Professor Srini Raghavan, Professor of Materials Science and Engineering, University of Arizona

 

10:40 to 11:00

Refreshment Break


Session II
Technical Seminar

Surface Conditioning Industry Drivers, Challenges and Solutions


11:00 to 11:30

FSI Corporate and Product Overview - FSI International

 

11:30 to 12:00

Drivers for Low Silicon Loss PR Stripping and Cleaning - FSI International

 

12:00 to 12:20

Steam-Injected SPM for High Performance Ash-Free All Wet Photoresist Stripping - FSI Inernational

12:20 to 13:50

Lunch and Afternoon Registration

 

13:50 - 14:00

Evolution of Salicide - FSI International

 

14:00 - 14:20

NiPt Stripping for Salicide Formation - STMicroelectronics

 

14:20 - 14:40

FSI Single Wafer Cleaning System Overview - FSI International

 

14:40 - 15:10

Cu/low-k Challenges and Cleaning Process Development for 32nm/22nm Logic Technology - LETI

 

15:10 - 15:30

Cryogenic Aerosol Processes for Yield Enhancement - FSI International

 

15:30 - 15:50

Refreshment Break

 

15:50 - 16:10

Report on 3D Interconnect and Metal Wafer Bonding - LETI

 

16:10 - 16:30

Impact of Drying on Bonding - LETI

 

16:30 - 16:50

ZETA® System for In-House Wafer Reclaim - FSI International

 

16:50

Adjourn

 

 

 

Seminar Registration

(* indicates a required field)

Attendee Information

Ms. Mrs. Dr. Mr.

: First Name*

: Last Name*

: Title*

: Company/Organization*

: Street Address (line 1)*

: Street Address (line 2)

: City*

: State/Province*

: Postal Code*

: Country*

: Telephone*

: Cellular/Mobile Phone

: Fax

: E-mail Address*

 

Event Information

(Please check each event you will attend)

Will Attend:

Session, Time and Description:

8:00 to 11:00
Session I of FSI's Knowledge Services™ Seminar Series
Short Course: Cleaning Chemistry Compatibility with New IC Device Materials
Taught by Dr. Srini Raghavan, Professor of Materials Science and Engineering, University of Arizona

11:00 to 16:50
Session II of FSI's Knowledge Services™ Seminar Series
Surface Conditioning Industry Drivers, Challenges and Solutions,
FSI and invited presentations

Seminar Location

Château de Sassenage

Allée du Château, 38360 Sassenage, France

 

To view the venue, click here.

Ample parking is available at this location.

Hotel Accomodations

Novotel Centre Grenoble

7 place Robert Schuman, 38000 Grenoble, France

 

To view the hotel, click here.

 

Please contact the hotel directly if you need to reserve a hotel room.

 

Other Information

Special needs (Diet/Medical/Other):

Emergency Contact Name (optional):

Emergency Contact Phone Number (optional):

Conference Materials

All conference attendees will receive a binder of conference materials at the seminar.

If you have additional questions, please contact Mary Olson at:
mary.olson@fsi-intl.com.