Europe Middle East Area (EMEA) FSI Knowledge Services™ Seminar Series

The FSI EMEA Knowledge Services™ Seminar Series was held in Grenoble, France, Dresden, Germany and Tel Aviv, Israel during the weeks of October 16 and 23. Over 150 customers participated in this highly rated seminar series.

Below is a list of presentation topics. To request a CD of the FSI EMEA Knowledge Services™ Seminar presentations, click here.

Short Course:

• “Fundamentals of Particle Adhesion and Removal” – taught by Dr. Stephen P. Beaudoin, Professor of Chemical Engineering, Purdue University

ANTARES® CryoKinetic Cleaning System

• FSI ANTARES® CryoKinetic Cleaning System Product Overview
• “FSI ANTARES® System – AMD Evaluation” – Vivien Schroeder and Val Parks (AMD)
• Post Inline Probe Particle Removal and Yield Recovery with Cryogenic Aerosol

MAGELLAN® Immersion Cleaning System

• FSI MAGELLAN® Immersion Cleaning System Product Overview
• “Molecular bonding for substrates: elaboration and circuit transfer” – Nelly Kernevez (Leti)
• “Silicon nanocrystals for non volatile memories: Surface preparation challenges” – Joel Dufourcq, Atmel)
• Achieving Ultra-Low Defectivity in Immersion Cleaning
• Precision Etching With Chemical Inject
• Advanced Silicon Nitride Wet Etching Processes and Applications

ZETA® Spray Cleaning System

• FSI ZETA® Spray Cleaning System Product Overview
• “Advanced Cobalt Stripping Process for High Yield Salicide Formation” – Eran Veler-Poleg (Tower Semiconductor)
• Ni/NiPt Stripping and Contact Cleaning
• All-Wet Stripping of Implanted Photoresist

Other Topics

• “Advanced SOI and Engineered Materials” – Ionut Radu (Soitec)
• Damage-Free Processing of Advanced Multiple-Gate FETs
• Challenges and Solutions in Surface Preparation
• Introduction to FSI International
• “Novel Ultra-Fast Wet Electrochemical Etching of Silicon” - Professor Yair Ein-Eli (The Technion)
• “Semiconductor Forecast - Applications Lead to Opportunities” - Joanne Itow (Semico)