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FSI International (ticker: FSII, exchange: NASDAQ) News Release - 6/9/03
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FSI International Announces DNS Acquires Rights to the "Lithography Breakfast Forum" Held Annually at SEMICON West

Forum to be held July 15, during SEMICON West 2003 in San Francisco

MINNEAPOLIS (June 9, 2003) – FSI International, Inc. (Nasdaq: FSII) is pleased to announce that Dainippon Screen Mfg. Co. Ltd. (DNS) has acquired the rights and will host the Lithography Breakfast Forum, which is held annually each year during the SEMICON West tradeshow. This year’s Lithography Breakfast Forum marks the 10th annual anniversary of the event. The forum is scheduled for Tuesday, July 15, from 7:30 a.m. to 10:00 a.m. at the San Francisco Marriott, which is conveniently located next to the Moscone Center at 55 Fourth Street.

On March 17, 2003, FSI reported it would exit the resist processing market and transition out of its Microlithography business to focus exclusively on Surface Conditioning products and services.

“The annual Lithography Breakfast Forum provides an ideal venue for presenting views pertaining to industry challenges and the related lithography technology issues,” stated Don Mitchell, FSI International chairman and chief executive officer. “We are excited that DNS wants to keep this important forum alive and will host the breakfast in its 10th year.”

“DNS recognizes the Breakfast Forum as the premier lithography event at SEMICON West and we are proud to continue this tradition. The forum is an excellent setting for technology leaders to present and discuss lithography challenges vital to the progression of our industry,” stated George Petricich, DNS Electronics (USA) vice president of Product Marketing. “The theme of this year’s session will focus on the capability and extension of 193nm (ArF) photolithography for high volume manufacturing of 45nm devices.”

For further details and to register for the 10th Annual Lithography Breakfast Forum, see the DNS Electronics (USA) website at http://www.dnse.com or contact the forum chairman, Charles Pieczulewski, product manager for DNS tracks, at 408-523-9140.

Dainippon Screen Mfg. Co., Ltd. (Kyoto, Japan), is a $1.3 billion company quoted on the Tokyo stock exchange. Established in 1943, it is one of the leading suppliers of semiconductor fabrication equipment including: coat/develop tracks, batch & single wafer cleaning and surface preparation systems, lamp/flash anneal, and metrology tools. It is also a manufacturer and supplier of flat panel display production equipment, prepress and printing equipment. Dainippon Screen corporate website http://www.screen.co.jp/

FSI International Inc., a global supplier of surface conditioning equipment, delivers economic and technical advantages for current and emerging microelectronics manufacturing challenges. Using the company's broad portfolio of products, which include immersion, spray, vapor and CryoKinetic systems for wafer cleaning, customers are able to efficiently achieve their goals. FSI’s customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region.

FSI is a 2002 recipient of the VLSI Research 10 BEST Award. In seven of the last ten years, FSI has been recognized for its superior customer satisfaction in the category of Small Suppliers of Wafer Processing Equipment.

FSI maintains a Web site at http://www.fsi-intl.com

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