FSI International (ticker:
FSII, exchange: NASDAQ) News Release - 12/21/04
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FSI International Receives Follow On Orders From International
Customers For Its ZETA® Spray Cleaning System
MINNEAPOLIS (Dec.
21, 2004) -- FSI International, Inc. (Nasdaq: FSII) today announced
that the company has received repeat orders for its 300-mm ZETA® Spray
Cleaning System. The repeat order from a leading IC manufacturer
based in Taiwan will be used for front-end-of-line (FEOL) surface
preparation at the 90-nm technology node and the ZETA System
ordered by a major microprocessor manufacturer will be used for
back end applications.
The repeat order from the Taiwanese customer
is the result of the ZETA System’s successful performance
in a 65-nm joint development program. The System demonstrated
the ability to meet the customer’s aggressive process performance
requirements with significantly less chemical consumption than
competing single wafer wet cleaning systems with the added benefits
of less capital investment and footprint when compared to competing
wet benches.
“Global semiconductor manufacturers continue to recognize
that the ZETA System’s performance, productivity and cost
advantages make it the clear choice for a broad range of cleaning
applications,” said Don Mitchell, FSI chairman and CEO. “These
repeat orders are a testament to the high degree of satisfaction
with the ZETA System’s capabilities and production performance.
The ZETA System offers customers the advantage of high throughput
batch processing, while providing the short cycle times required
by IC manufacturers.”
FSI’s ZETA Spray Cleaning System
includes fully automated configurations for 200- and 300-mm wafer
sizes and semi-automated configurations for 200- and 150-mm wafer
sizes. The ZETA System is proven for a wide range of applications,
including FEOL resist strip and post-ash clean, back-end-of-line
(BEOL) post-ash clean, salicide strip, wafer bumping and wafer
reclaim. The system uses centrifugal spray technology; wafers
undergo dry-in, dry-out processing in a closed, nitrogen-purged
chamber. FSI's versatile chemical delivery technology prepares
the chemicals at controlled composition and temperature and delivers
them directly onto the wafers. ZETA Systems are priced from $1.0
to $2.8 million.
More than 1,000 FSI batch spray tools are currently
being used in semiconductor production worldwide.
FSI International
Inc. is a global supplier of surface conditioning equipment technology
and support services for microelectronics manufacturing. Using
the Company’s broad portfolio of cleaning
products, which include batch and single-wafer platforms for
immersion, spray, vapor and CryoKinetic technologies, customers
are able to achieve their process performance, flexibility and
productivity goals.
The Company’s support services programs
provide product and process enhancements to extend the life of
installed FSI equipment, enabling worldwide customers to realize
a higher return on their capital investment.
FSI maintains a Web
site at www.fsi-intl.com.
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