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FSI International (ticker: FSII, exchange: NASDAQ) News Release - 2/19/04
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FSI International and SCP Global Technologies Announce That They Have Settled Their Patent Litigation

MINNEAPOLIS (February 19, 2004) -- FSI International, Inc. (Nasdaq: FSII) and SCP Global Technologies, Inc. have settled two lawsuits for patent infringement pending in the United States District Court for the District of Delaware. In those lawsuits, SCP asserted four patents relating to its Full-Flow technology and IPA drying technology against FSI products that incorporate the Surface Tension Gradient (STG®) technology that FSI obtained with the acquisition of YieldUP International in 1999. In an effort to settle these lawsuits, FSI acknowledges the validity and enforceability of the SCP patents, but disputes that any of FSI’s products infringe upon the claims of the patents.

FSI will pay SCP $4.0 million for a release from past infringement claims and a prospective license under all four SCP patents. The release will apply to all purchasers of FSI products containing its STG® technology. The prospective license will apply to all end-user customers of FSI products, subject to certain limitations. In addition, FSI agreed to supply SCP customers, at a pre-established price, its rinse/dry kits to implement FSI’s STG® technology for certain applications.

FSI will make an initial payment of $2.5 million on March 1, 2004, and additional payments of $750,000 on both the first and second anniversaries of the effective date of the settlement agreement. As a result, FSI will record a $3.4 million charge to earnings in its second quarter, ending February 28, 2004, of fiscal 2004.

About FSI International, Inc.

FSI International, Inc. is a global supplier of surface conditioning equipment technology and support services for microelectronics manufacturing. Using the Company’s broad portfolio of cleaning products, which include batch and single-wafer platforms for immersion, spray, vapor and CryoKinetic technologies, customers are able to achieve their process performance, flexibility and productivity goals.

The Company’s support services programs provide product and process enhancements to extend the life of installed FSI equipment, enabling worldwide customers to realize a higher return on their capital investment.

FSI maintains a Web site at www.fsi-intl.com.

About SCP Global Technologies

Established in 1975, SCP Global Technologies is a leader in the development of wet processing technology and equipment used in the manufacture of semiconductor wafers. SCP holds patents on single wafer drying technologies, and also on Marangoni®, GreenDry® and GreenDry CI™ (Chemical Inject) drying technologies for today's most complex cleaning and drying challenges. The company is committed to being the worldwide leader in surface preparation technology, systems and services to the semiconductor and related industries. Learn more about SCP at www.scpglobal.com

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