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FSI International (ticker: FSII, exchange: NASDAQ) News Release - 5/3/04
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May Process Outlook Forum™ to Feature International SEMATECH’s Wafer Cleaning and Surface Preparation Conference

FSI and Pennwell Increasing Collaboration with Other Organizations to Provide Expanded Access to Critical IC Manufacturing Issues Via Web-based Seminars

MINNEAPOLIS (May 3, 2004) -- FSI International, Inc. (Nasdaq: FSII) and Solid State Technology/Pennwell today announced that the May installment of the popular Process Outlook Forum™ seminar series will be broadcast live from the International SEMATECH 2004 Wafer Cleaning and Surface Preparation Conference on May 6 from 8-9 a.m. Central Daylight Time. The event will feature presentations titled “Challenges for Surface Preparation” by Philips Semiconductor Principal Scientist Dr. D. Martin Knotter and “Highlights of the 2003 ITRS Surface Preparation Roadmap” by FSI International Chief Technologist Dr. Jeff Butterbaugh. Free registration for the web-based seminar is available at www.fsi-intl.com/forum.

The Process Outlook Forum web-based seminar series is designed as a non-commercial, open symposium that brings together professionals from throughout the semiconductor industry to focus on future IC processing challenges over a range of functional areas. The free seminars are held monthly.

International SEMATECH’s Wafer Cleaning and Surface Preparation Conference is scheduled for May 6-7 at the Omni Hotel in Austin, Texas. “The conference is designed for the exchange and understanding of current information about wafer cleaning, including front-end, back-end, as well as environment, safety and health issues,” said Dr. Naim Moumen, SEMATECH’s Advanced Gate Cleans manager and one of the event organizers. “Researchers, suppliers and end-users will meet to address wafer cleaning needs providing attendees with an understanding of developing technologies, solutions and limitations for wafer cleaning.”

“International SEMATECH’s Surface Preparation Conference is focused on identifying upcoming challenges and potential solutions in surface preparation for IC manufacturing, which aligns perfectly with the goals of FSI’s Process Outlook Forum,” Dr. Butterbaugh said. “Dr. Knotter's keynote presentation addressing key challenges in particle removal without damage and without etching should be of particular interest to our participants.”

Monthly registration for the Process Outlook Forum is free and open to anyone at www.fsi-intl.com/forum.. The Process Outlook Forum, which was launched in April 2003, is designed to provide value to engineers, researchers and others in the semiconductor industry by addressing the full spectrum of issues pertaining to IC process technology challenges. The convenient, open format of the program allows registrants to access and download the material, including presentations and an audio MP3 recording, at any time – even weeks after an event takes place.

FSI International, Inc. is a global supplier of surface conditioning equipment technology and support services for microelectronics manufacturing. Using the Company’s broad portfolio of cleaning products, which include batch and single-wafer platforms for immersion, spray, vapor and CryoKinetic technologies, customers are able to achieve their process performance, flexibility and productivity goals.

The Company’s support services programs provide product and process enhancements to extend the life of installed FSI equipment, enabling worldwide customers to realize a higher return on their capital investment.

FSI maintains a web site at http://www.fsi-intl.com.

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