FSI International (ticker: FSII, exchange: NASDAQ) News Release - 06/06/06
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FSI International Receives Multi-Unit Order for its MAGELLAN® Immersion Cleaning System from Leading U.S. IC Manufacturer

MINNEAPOLIS (June 6, 2006) — FSI International, Inc. (Nasdaq: FSII) today announced that a world-leading U.S. IC manufacturer has placed a multi-unit order for its 200/300mm MAGELLAN® Immersion Cleaning System. This order is a result of the MAGELLAN system’s best-of-breed particle and etch uniformity performance. The tools will be used in manufacturing and are expected to ship during the first half of FSI’s fiscal 2007.

“After a successful evaluation at the customer’s facility, this order is further validation of the MAGELLAN’s superior process capabilities,” said Don Mitchell, FSI International chairman and CEO. “We entered the billion dollar wet-bench market because we believed it was being served by insufficient technology. This order affirms that there is opportunity in mature markets, provided a supplier can deliver a differentiated product with superior process performance.”

The MAGELLAN system is a 200/300mm bridge tool, designed to meet the challenges of advanced IC development and manufacturing through its unparalleled process performance and configurability. Contributing to its industry-leading capabilities are FSI’s proprietary surface tension gradient (STG®) rinse/dry, SymFlow® etch and MegaLens™ megasonic technologies. The MAGELLAN system process is watermark-free on all surface types, and it delivers precise, ultra-uniform film etching, high-particle removal efficiencies and exceptional defect control. The MAGELLAN system selling price ranges from $1.5 to $5.0 million, depending on the number of modules and final configuration.

FSI International, Inc. is a global supplier of surface conditioning equipment technology and support services for microelectronics manufacturing. Using the Company’s broad portfolio of cleaning products, which include batch and single-wafer platforms for immersion, spray, vapor and CryoKinetic technologies, customers are able to achieve their process performance, flexibility and productivity goals. The Company’s support services programs provide product and process enhancements to extend the life of installed FSI equipment, enabling worldwide customers to realize a higher return on their capital investment. FSI maintains a web site at http://www.fsi-intl.com.

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