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IN THIS ISSUE

June 2007


PREVIOUS ISSUES


 PSS Newsletter Will Keep You Informed!

Welcome to the latest issue of the FSI International POLARIS® Systems & Service (PSS) Newsletter. These periodic newsletters provide FSI with the opportunity to share information with our customers about our latest activities. Customer comments are welcomed at all times, so please contact matt.crowder@fsi-intl.com to provide feedback and suggestions.

This issue focuses on:

  • Substantial savings on NEW RX90 robots for a LIMITED TIME ONLY!
  • Dual Wafer Size POLARIS® - It's not just an upgrade, it's an immediate leap in flexibility
  • GEN2 IEP Bake Lid Upgrade - Reduce PMs on bake plates without compromising uniformity!

 Buy New RX90 Robots at 26% discount in 2007 – WHILE THEY ARE AVAILABLE!

FSI’s POLARIS® Advanced Technology Roadmap incorporates the implementation of the TX90 series robot as an upgrade from the RX90 series robot for all POLARIS® systems. The implementation of the TX90 is an important milestone in the continued development of POLARIS® systems, but we realize it is equally important to provide a path for customers who wish to continue using the RX90 series instead of converting to the TX90.

FSI will offer new RX90 series robots to our customers at a 26% discount through the end of calendar year 2007. Orders must be placed by November 15, 2007 and will require a core return. After the end of calendar year 2007, new RX90 series robots will no longer be offered to our customers.

“This program provides a cost-effective means to replace RX90s in the field prior to their becoming end-of-life. Our installed base continues to grow, and supporting existing and future customers is fundamental to the success of the organization,” said Matt Crowder, director of sales, product management and operations.

Please contact your POLARIS® sales representative to order new RX90 robots, while they are still available.


 TWO WAFER SIZES at the same time through the same POLARIS® System?

FSI is pleased to announce the Dual Wafer Size (DWS) POLARIS® system. This system simultaneously runs both 150mm and 200mm wafer sizes through the same system, using the same modules, while producing the same results as single wafer size POLARIS® systems.

“Running two wafer sizes in parallel further substantiates the POLARIS® system as the most flexible lithography tool in the industry,” states John Walker, vice president of strategic initiatives and FSI Allen general manager. “Customers now have the option of a DWS POLARIS® system instead of purchasing two systems or having to perform wafer size conversions when required. The DWS POLARIS® system is truly a breakthrough that will provide more productivity value to existing and new customers.”

Please contact your POLARIS® System Sales Representative today for more information about the DWS POLARIS® system.


 Generation (2) Improved Exhaust Path Lids Post Great Results

Our Generation 2 IEP lids are showing very positive performance results. We have launched several beta agreements for this new product, and these customers are seeing results that justify purchasing the new lids.

“These lids are critical for customers who run thicker chemistries,” said David Vickers, POLARIS® sales and product management. “The IEP kit will reduce collection of effluents on bake lids while providing a new filter system designed to exhaust and capture effluents outside the lid. Further, the lids show improved performance in mode 2 (Exhaust and N2 on) which provides better exhaust without compromising uniformity. In addition, the lids reduce solvent odors and prevent solvent dripping onto the surface of the wafer.”

Generation 2 IEP lids are available for P2000 through P3500 bake plates, so please contact your POLARIS® sales representative for more information.