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April 2005


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Spring Issue of PSS e-Newsletter Keeps You Informed

Welcome to the latest issue of the FSI International POLARIS® Systems & Services (PSS) e-Newsletter. We want to keep you up to date on PSS activities to ensure we are maximizing your fab productivity and supporting your objectives. This issue focuses on PSS business updates, late spring POLARIS® Systems User Group Meetings and our Auto Teach™ Upgrade. Read on …


 Grow Your Success This Spring

Springtime is here, a time of new opportunities—perfect for our POLARIS® System Refresh Program™. Through this newsletter, we’re planting the seeds to help you maximize your fab productivity and achieve further growth. This new season also brings many positive changes to support our customer offerings from FSI Allen and POLARIS® Systems & Services (PSS).

A notable change for FSI Allen came this past winter when we sold our building and, via a lease-back, began sharing the building with another lessee. We are now aligned with our business model while retaining full capacity for Class 10,000 POLARIS® System manufacturing, Class 1 process-development laboratory and inventory space. We’ve also dedicated hardware and software engineering development labs to bolster the efficiency of our engineering and operations teams and drive long-term growth. In addition, we are actively embracing the Lean Six Sigma methodology as we pursue new product developments.

The POLARIS® System continues to link to the industry’s leading-edge exposure systems with experience in 193nm and now immersion lithography. We sincerely appreciate that you, our loyal customers, have trusted us to support your interests as we developed and refined our ongoing PSS business model.

We welcome the opportunity to tell you more in person, even before our annual POLARIS® System User Group Meetings (see dates below). Talk to us today about:

  • Support for your existing POLARIS® Systems
  • Your suggestions for new systems
  • Engineering consultation
  • Many productivity upgrades

Read on to learn more about our exciting new Auto Teach™ Upgrade aimed at further reducing the Cost of Ownership (CoO) of your systems.

We’re ready to help you reap the benefits of our expertise. Please call or e-mail us to review your specific requirements.

John Walker
VP, Strategic Initiatives and GM, FSI Allen Operations
972-643-2136 (office)
john.walker@fsi-intl.com


 Join The Next POLARIS® System User Group Meeting Near You

Plan now to attend the next POLARIS® System User Group Meeting to learn how to maximize your system capabilities. This FREE information exchange provides an opportunity to talk face to face with the PSS team about the latest hardware, software, Refresh Program™, and process results.

  • See the impressive defect-reduction results and results of our thermal studies
  • Learn ways to achieve enhanced performance for your tool set
  • Discover insights to extending the POLARIS® system life span
  • Share your suggestions and help shape our goals for next year

"This is the third year we’ve had these dialogue sessions,” said Matt Crowder, PSS Sales and Director of Product Management. “Our User Group Meetings are a success because they’re a great forum to communicate our new products and services. In addition, we solicit ideas from our customers to direct our efforts for the next year.”

Find a POLARIS® System Users Group Meeting near you:

Region

City

Date

East Coast

Portland, Maine

May 16, 2005

Upper Midwest

Bloomington, Minnesota

May 19, 2005

West Coast

Milpitas, California

May 23, 2005

South-Central

Allen, Texas

June 10, 2005

Great Britain

Hazelgrove, England

June 23, 2005

Europe

Nijmegen, The Netherlands

June 27, 2005

Please use our Information Request Form to request more information about a particular meeting and for information on registering to attend a meeting.


 POLARIS® System Auto Teach™ Upgrade Ready With Proven Results

Save significant time teaching each robot while you eliminate human-induced error with the POLARIS® System Auto Teach™ Upgrade.

  • Improves robot repeatability
  • Teaches for more accuracy and reliability—the POLARIS® cluster “teaches” exactly the same way every time, no matter which technician uses it
  • Reduces breakage with revised handling for precise wafer handoff and pick-up points

Using sophisticated electronics and software, Auto Teach™ eliminates technician-to-technician variability.

“We designed the upgrade to tackle the human-induced errors,” said David Vickers, Sales and Product Manager at the Allen, Texas facility. “The 300-mm testing shows it saves teaching time and greatly improves wafer location teaching accuracy.”

He added that FSI expects similarly successful upgrade results from scheduled 200-mm tests.

Available for all POLARIS® RX90-equipped 200-mm and 300-mm clusters, Auto Teach™ provides innovative, fast and reliable self-teaching kits. The upgrade price is approximately $7500 per robot.

For ordering information in the US, please contact David Vickers, Sales and Product Manager. For ordering information in Europe, please contact Rene ten Bras, PSS European Customer Support Manager.


 FREE Standard Tool Enhancements CDs

Have you received your FREE Standard Tool Enhancement CD? Reserve yours now and learn detailed information about available upgrades to increase your throughput, improve critical dimensions and reduce defects. Easy to use, the CD shows information by model for fast reference.

At PSS, we look to our customers for from-the-field feedback. We want to develop products and services that bring value to you. Request your CD now and let us know how we can help you improve the performance of your POLARIS® System in the near future.

Please use our POLARIS® Upgrade CD Request Form to request a CD, or for more information, contact Matt Crowder, PSS Sales and Director of Product Management.