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June 2007

IN THIS ISSUE

October 2004

PSS Newsletter Will Keep You Informed

Hot Topic

POLARIS® Refresh Program™

Standard Tool Enhancements

What's New: Productivity Upgrads

Software News

PREVIOUS ISSUES

November 2006

November 2005

April 2005

 PSS Newsletter Will Keep You Informed

 Hot Topic

The POLARIS® Cluster is a state-of-the-art microlithography resist processing tool that is capable of 70nm applications and beyond. The legacy of the POLARIS® Cluster is its high throughput and leading, world class CD performance. The POLARIS® Cluster is still available today for existing customers as well as new customers, so let us know how we can help you produce "more good die out" at the lowest cost. The chart below shows the tactical programs that put FSI in the key strategic position of being able to offer fabs the highest productivity output.

POLARIS® Systems & Services = Customer Focused for PRODUCTIVITY resulting in more good die per day.

 POLARIS® Refresh Program™

The POLARIS® Refresh Program™ may be just what you're looking for!
Add capacity for less investment.

POLARIS® Systems & Services (PSS) recently launched its Refresh Program™ to serve current and future POLARIS® Cluster customers. Through this program, customers can purchase previously-owned POLARIS® Clusters that have been re-qualified in our Allen, Texas facility. These systems undergo a series of tests and upgrades at the module and system level and are offered to customers with six-month, parts-only warranties. PSS is producing systems with shorter lead times and at lower prices. Customers have responded creating a substantial demand.

The Refresh Program™ includes the following POLARIS® Systems: P2000, P2100, P2200, P2500 and P3500. These systems are able to accommodate a variety of processes and can be purchased in their current configuration, or reconfigured and upgraded to match any delivered configuration in our worldwide installed base. Visit the POLARIS® Systems & Services page for more information about our Refresh Program™ and let us know how we can help you meet your needs for additional capacity.

 Standard Tool Enhancements

As part of our strategy to enhance the performance of all existing POLARIS® Systems, we are pleased to offer Standard Tool Enhancement CDs to all of our customers. Sent to you upon request, these CDs contain detailed information about available upgrades to increase your throughput, improve critical dimensions, and reduce defects. The CD is easy to use and information is categorized by model.

At PSS, we are constantly soliciting information from our customers to ensure our efforts are spent developing offerings that bring value to you. Please request this CD and let us know how we can help you improve the performance of your POLARIS® System in the near future.

Request a CD using the form on this website.

 What's New: Productivity Upgrades

PSS offers a suite of productivity upgrades. See the links below for complete information on these offerings.

TTU™ Hotplate Design - PSS's new TTU hotplate technology offers customers a significant improvement in CD control for advanced lithographic applications. In addition to improved CD performance with 248nm DUV processes, the improved plate will surpass performance previously possible with 193nm ArF and F2 lithography applications through the 70nm processing node. This plug-and-play upgrade is currently available for your POLARIS® Cluster and can be ordered today.
Learn More ...

PELA Plus™ - a software package that provides a fast and efficient method for determining the "health" of a POLARIS® Cluster by analyzing POLARIS® Event and Error Logs. PELA Plus™ will enable the optimization of a preventive maintenance plan for the POLARIS® Cluster, thus reducing down time.
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POLARIS® Auto Teach - provides an innovative, fast and reliable method for precisely locating wafer handoff and pick-up points. Up to now, robot teaching accuracy has been dependent upon the ability and eye of the technician. Now, using sophisticated electronics and software, your POLARIS® Cluster will self teach exactly the same way every time with very little interaction from a technician.
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Pre-owned Robot Arms - completely tested units that are functionally equivalent to new robots. All used robots meet or exceed PSS specifications and a specification sheet is provided with all shipments. There is a 30-day warranty on each arm and they are available for immediate delivery. However, inventory levels fluctuate, so contact us to provide you with pre-owned robots to meet your needs.
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POLARIS® Mini-Thermal Tracks™ (MTT) and Mini-Mobile Tracks™ (MMT) - unique-in-the-market miniature POLARIS® Clusters designed to link to stepper/scanners or dual link to a stepper and a track. Both versions improve PEB results and the Mini Thermal Track improves CD results by up to 50%. These miniature clusters are available for various wafer sizes. Contact us today to see if your application fits the design of an MTT or MMT.
Learn More ...

 Software News

Look for POLARIS® Software Updates

Drawing on more than 100 years of combined POLARIS® System software and robot experience, we are committed to delivering to you, our customers, robust software that provides features that make your job easier.

Software contract customers will notice some changes this year. First, we will automatically ship you a new release when it is available, meaning you no longer have to go through order entry. Second, we are asking you to complete a survey for each system when you install a new release. The survey asks how the new release features are working for you and requests suggestions on additional features that would assist you in the future.

Based on feedback from customer surveys and user group meetings, software contract customers can expect to receive at least two releases each year for their P2000 through P3500 systems. If you have not been asked for your input, please contact us any time with your ideas. Release 8.02 was shipped in February, 2004, release 8.03 is due out in September, 2004, and 8.04 is scheduled for February 2005 so be sure to renew your software contract for next year.

8.02 Release - In our 8.02 release we focused on improving throughput on the P2500/P3500 systems. We achieved this by decreasing the overhead and improving the PID algorithm. With these changes, you can expect a 1.5+ second improvement in Bakes and Chills, and a 7 second improvement in Coat and Develop. We also made some scheduling changes that help in parallel machine configurations. The 8.02 release also includes many other enhancements that will help make your job easier.

8.03 Release - The 8.03 release, currently in system test, will feature overhead reductions, new bowl matching capabilities, and individual nozzle sleep dispense for the P2000 Series systems. The update will allow all systems to perform a recipe command through engineering commands and to create "macro" recipe commands.
For details on any of our software releases, please contact Elizabeth Wiseman, PSS Software Manager.

8.04 Release - Release 8.04 is in the planning/development stages; therefore, if you have any enhancement requests, please contact Elizabeth Wiseman, PSS Software Manager.

Our focus is on providing you with reliable software that can also meet your unique needs, thus improving tool utilization and contributing to overall FAB productivity.