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Fall Issue of PSS Newsletter Keeps You Updated |
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Welcome to the latest issue of the FSI International POLARIS® Systems & Services (PSS) Newsletter. These periodic newsletters provide FSI with the opportunity to share information with our customers about our latest activities. Customer comments are welcomed at all times, so please feel free to share your input. Contact Matt.Crowder@fsi-intl.com to provide feedback and suggestions.
This issue focuses on PSS business updates, a recap of our Users Group Meetings, technical information about mass flow controllers, ongoing order activity and looking ahead at what we are presenting at SPIE 2006. Read on…
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Ensuring Our Goals Align With Yours |
As 2005 draws to a close, we want to thank you for one of our most successful years at POLARIS® Systems & Services (PSS). We appreciate your continued trust, and we’re pleased to deliver so many additional new and refreshed POLARIS® systems to the field. (POLARIS® System Refresh Program™)
The PSS team is committed to extending our successful track record as we set goals for next year. To carry the momentum forward, we are working to ensure our goals align with our customers’ expectations in the best possible manner. Your comments and feedback are always appreciated.
We also want you to know that FSI is evaluating and will incrementally add the proven POLARIS® system wafer handling and architectural platform to other FSI products. Our objective is to help our customers realize the benefits from common tool platforms, such as reduced cost of ownership (COO), increased throughput, enhanced handling and better scheduling. A shared platform inherently enables cost savings and reduces end of life (EOL) risks.
Teams from the Design and Development Center at FSI-Allen, Texas and the Chaska-based Surface Conditioning organization have jointly handled the platform work. Customers interested in POLARIS® system products and Surface Conditioning products should expect to realize the benefits of our efforts. Ultimately, our goal is to ensure that we stay aligned with the many aspects of the ITRS roadmap.
Over the next year, we will continue to share information with you at various industry technical seminars and via the trade press, particularly about our latest technical advancements in lithography. We have submitted white papers that address lithography innovations enabled by enhanced track design, and look forward to presenting our progress.
As always, we welcome your comments. Talk to us today about:
- Support for your existing POLARIS® System
- Details about the POLARIS® System Refresh Program™
- Suggestions for new systems
- Engineering consultation
- Productivity upgrades
Sincerely,
John Walker
VP, Strategic Initiatives & GM, FSI-Allen
972-643-2136 (office)
john.walker@fsi-intl.com
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PSS Users Group Meetings Share Helpful Information |
POLARIS® System User Group Meetings wrapped up after two months of highly productive face-to-face meetings between representatives from PSS and POLARIS® customers. Meetings were scheduled across the U.S. and Europe.
“Attendance was excellent,” said Matt Crowder, PSS Sales and Director of Product Management. “We visited with more than fifty people who represented fifteen U.S. and seven European customers.”
Representatives talked in-depth with the PSS team about hardware, software, the Refresh Program™, and other process-improving ideas.
According to Matt, the PSS team compiled more than 450 specific comments provided by POLARIS® customers that will shape PSS goals and activities in the coming year.
Some highlights from that comment list include:
- Customers like the “module coming offline” option and the ability to see from the desk which modules are offline.
- The 8.01 “return to default temperature” and 8.03 “cross reference recipe/flow” are good ideas.
- The wafer tracking is very useful, the nest fixes are helpful, and the host autotweak looks great.
- In general, the MMT is a big help.
- Customers noted they were very impressed with what FSI has done in the last year.
“We thank the people who participated in our Users Group Meetings,” Matt added. “They’ve provided us with critical information to guide our efforts—which will benefit all PSS customers in the long run.”
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Helpful Hint: PM Reminder For P2500 DPBC HMDS Mass Flow Detector |
As you probably know, the mass flow detector that monitors HMDS and N2 flow for P2500 DPBC Prime Stations needs to be replaced yearly. (For details, see the PM Schedule in Appendix C of the Operation and Maintenance Manual – 12-Month Schedule.)
But you might not know why. The manufacturer of the mass flow detector recommends yearly calibration to maintain accurate indication of flow. However, only the manufacturer can perform this calibration. That’s simply not feasible on site, in most cases. To ensure precise flow indication and proper calibration, follow the PM requirement: change out the mass flow detector on a yearly basis.
“We recommend that customers purchase one or more spare mass flow detectors (FSI P/N 309370-001, 309370-001-RFS, 309370-001-RPR) to keep on hand,” explained Bob Schram, Manager of PSS Technical Support. “This way, the detector can be rapidly changed during PM and the customer can send the old one to FSI for recalibration.”
As a service to customers, FSI arranges for these used mass flow detectors to be recalibrated and then returns the recalibrated equipment to you for use during the next yearly PM cycle.
Please contact the FSI Technical Support Team with any questions you have or to obtain additional information. Call 1-888-FSI-INTL (643-5678) or TSC@fsi-intl.com.
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Repeat Order Received from Thin Film Head Manufacturer |
FSI International proudly announces a repeat order received for a Refresh POLARIS® system, which is to be delivered to a major hard drive manufacturer at the end of 2005.
“This repeat order signifies our growing presence in the hard drive market, and is evidence of our ability to provide high-quality systems at reasonable prices,” said John Walker, VP of Strategic Initiatives and GM FSI-Allen.
Demand for POLARIS® systems for the thin film industry has been strong. We anticipate additional Refresh POLARIS® System orders as our customers increase their manufacturing capacity.
In addition, FSI International continues to place proposals in niche markets such as Polyimide, BUMP, MEMS, PIQ, and other applications. The flexibility of POLARIS® enables the company’s success across many applications both in R&D and production.
Please see the following link for more information about our Refresh Program: (POLARIS® System Refresh Program™) |
Looking Ahead |
SPIE Symposium on Microlithography, February 2006
FSI will be presenting two papers at the conference on “Advances in Resist Materials and Processing Technology XXIII”, part of the SPIE Symposium on Microlithography, February 19-24, 2006, in San Jose, CA.
See the following link for the abstract on the paper titled, “ArF processing of 90-nm design rule lithography achieved through enhanced thermal processing”: (Abstract #6153-116) This paper will be presented on February 20, 2006.
See the following link for the abstract on the paper titled, “Extending i-line capabilities through variance”: (Abstract #6153-119) This paper will be presented on February 20, 2006.
See the following link for more information about SPIE, the International Society for Optical Engineering: (http://www.spie.org) |
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