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November 2006


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 PSS Newsletter Will Keep You Informed!

Welcome to the latest issue of the FSI International POLARIS® Systems & Services (PSS) Newsletter. Through our free newsletter you'll find out about our latest activities, important service suggestions, developments, new products and services.

If you want more information on a topic, links will guide you quickly and easily to detailed descriptions on the FSI web site.

This issue focuses on PSS business update, an overview of a time sensitive issue regarding customer productivity and robot servicing, and availability of a defect reduction upgrade enhancement. Read on ...


 POLARIS® System Repeat Order Received for 193nm Application in the Thin Film Head Industry

FSI is pleased to announce the FY2006 receipt of a multiple system order for POLARIS® P2500 systems by a leading provider of hard disc drives.

“This repeat order helps strengthen our presence in the thin film head industry and is further evidence that the P2500 is the “tool of choice” for 193nm applications”, said John Walker, vice president of strategic initiatives and general manager, FSI Allen. “It is our intent to continue providing product enhancements for the thin film head industry, as it is a key market for POLARIS® systems -- today and for the foreseeable future.”

This market’s need for special chemistries and superior flexibility is a perfect match for the POLARIS® P2500 system. In addition, by using POLARIS® platforms such as P2000, P2100, and P2200, hard disc drive customers can continue meeting the demands for superior process performance and flexibility.



 Helpful Hint: Refresh your RX90 Robots After Five Years of Service

Many customers have implemented rotation plans for robots that have been in production for more than five years.

“RX90 robots perform in a wide variety of POLARIS® system configurations, so it is difficult to predict when they need to undergo the Robot Refresh process,” says Bob Schram, PSS technical support manager. “We recommend that customers replace vital working components around the five year mark to reduce the chance of an unexpected failure.”

Customers who set up rotation plans begin by purchasing a refreshed robot. When the refreshed robot is received at the customer site, it replaces a robot that is returned to FSI. The returned robot is placed in the FSI Allen Robot Refresh manufacturing process. When the refresh is complete, the robot is sent back to the customer to replace the next robot. This continues until all robots have been through the FSI Robot Refresh process.

Contact us today to set up a Refresh rotation plan for your RX90 robots. Click here to find out more about our POLARIS® System Refresh Program™.


 Improved Exhaust Path Lid – Generation Two

FSI PSS has developed the generation two improved exhaust path lid, which will provide additional enhancements to the original design. The generation two lids will be placed at beta sites throughout the installed base of POLARIS® systems in December 2006, and will be rolled out as a purchasable upgrade by early 2007.

Previous to generation two, FSI developed an improved exhaust path lid for POLARIS® system customers running thicker chemistries. These lids allow for better exhaust, improved filtration and the capture of effluents that would otherwise collect on bake plate lids over a period of time. Results so far have been positive, showing improved exhaust results without compromising uniformity.

“We are excited about this next generation improvement to an already promising upgrade,” stated Steve Hanson, manager of FSI Allen design engineering.

Customers interested in participating in generation two beta testing should contact Matt Crowder at Matt.Crowder@fsi-intl.com.


 Send Us Your Suggestions for Software Enhancements!

Our goal is to provide software releases that provide continuous value. Recent software releases contain heavy-hitters such as reduced module overhead times, better tracking/event logging and many other great enhancements. We will continue to provide software releases based on ideas received from our employees, but more importantly, from our valued customers.

Please contact John Krieger, FSI software manager, at john.krieger@fsi-intl.com with your ideas for future software enhancements.


 Looking Ahead

Customer comments are always welcomed, so please feel free to contact matt.crowder@fsi-intl.com with your feedback and suggestions.