Applications Laboratory

Clean Room

• 100% HEPA Filters
• Class 1: 6500 square feet
• Class 10: 2000 square feet
• 30-Point Continuous Airborne Particle Monitoring to 10nm particle size

Complete line of FSI surface conditioning products

In-house metrology equipment

• SEM
• Particle counter
• Ellipsometer
• Four-point probe.

SPC particle tracking 90nm and 60nm

• 2002-2003: 90nm (already implemented)
• 2004-2005: 60nm (projected; gauge studies and preliminary tracking already in progress)

		If you would like to request an experiment for the FSI Applications Laboratory, please contact your local FSI account representative or click here and complete the request for more information form.