FSI

Legacy Products

FSI International has a 30-year history in the semiconductor industry and as a result, there is a large base of FSI equipment throughout the world. We have a variety of programs in place to directly support our equipment or we can provide direction to third parties supporting FSI legacy products.

Please use the following links to find information to address your needs:

FSI POLARIS® Refresh Program™

SSI Support Services

FSI Discontinued Surface Conditioning Products Supported by Asset Recovery Corporation

FSI and Asset Recovery Non-supported Surface Conditioning Products

FSI YieldUP® Systems Discontinued Product Support

FSI EXCALIBUR® System Discontinued Product Support

FSI Used Equipment Program

FSI Upgrade Program