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Product Detail
Discover
a new world of immersion capabilities
MAGELLAN® Immersion Cleaning System |
| In direct response to customer input, the MAGELLAN®
System sets new standards in immersion technology.
- Shorter cycle time: Reduce your production
time by up to 40% through MAGELLAN® System’s multi-function
tanks with super-efficient mixing.
- Breakthrough versatility and extendibility:
Reduce your capital outlay. One MAGELLAN®
System can support multiple processes and successive
technology nodes.
- Process performance: Improve yield
and reduce learning curve with MAGELLAN® System’s
patented technologies.
- Ultra-small footprint: Conserve your
valuable cleanroom space with modular configuration, up
to 40% smaller than traditional wet benches.
Applications:
FEOL critical clean, FEOL photoresist strip and
post-ash clean, Oxide etch, Nitride etch, wafer reclaim
Features:
- Modular configuration from 2 to 7 process
modules
- Proprietary chemical mixing manifold
on each process module, with variable valve control and
Advanced Process Control
- STG® (Surface Tension Gradient) rinse/dry
technology for watermark-free dry based on Marangoni principle
- SymFlow® in-situ oxide etching
with APC etch control
- Controlled, variable thickness DIO3 oxide
regrowth
- Advanced megasonics capabilities
- Advanced robotics and materials management
that is fast, flexible, reliable, and aids process performance
Available configurations:
- Fully automated 300mm
- Fully automated 200mm (bridging to 300mm)
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The
premier line of batch spray processors
ZETA® Spray Cleaning System
|
| From FSI International, the world’s leader in
batch spray processing, the ZETA® System offers the
ultimate performance and productivity for high contaminant
removal applications.
- High performance: Get the process repeatability
you demand, since all wafers receive the same fresh chemistry
and are monitored with APC features throughout processing.
- Balance of throughput and cycle time:
The high throughput of batch processing now has unprecedented
short cycle time, through FlashClean™ Advantage,
a package of hardware, software, and process advancements.
- Flexibility: Proprietary chemical mixing
manifold enables you to switch between processes on the
same tool, with no downtime.
Applications:
BEOL post-ash clean, FEOL post-ash clean and photoresist
strip, FEOL film strip, FEOL critical clean
Features:
- Proprietary chemical mixing manifold,
with variable valve control and Advanced Process Control
- Single-pass chemistry use, or onboard
temperature-controlled recirculation for specialty chemistries
- Ozone processing (piranha replacement)
option
Available configurations:
- Fully automated 300mm
- Fully automated 200mm
- Semi-automated 200mm
- Semi-automated 150mm
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Light
years ahead for better yield today
ANTARES® Cryokinetic
Cleaning System |
| Some leading IC manufacturers climb the yield curve
faster than others, and one reason for their success
is
the ANTARES® System.
The ANTARES® System
allows customers to remove defects more effectively and
apply in
places not addressable by traditional methods of particle
removal. Typical ROI results in 1 to 3 months.
- Particle removal with the all-dry, non-reactive,
and brushless CryoKinetic technology
- Safe and effective on sensitive new
materials such as Cu and low-k, unlike wet and scrubber
methods
that can alter material properties
- More effective in particle removal than
scrubbers in customer comparison
Applications:
FEOL and BEOL particle removal
Available configurations:
- Fully automated 300mm (bridging to 200mm)
- Fully automated 200mm (bridging to 300mm)
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Economical,
semi-automated batch spray processor
MERCURY® Spray Cleaning System |
| From FSI International, the world’s leader in
batch spray processing, the MERCURY® System satisfies
your processing needs at a low cost.
- Low COO
- High throughput
- Small footprint
Applications:
FEOL post-ash clean and photoresist strip, FEOL film strip,
FEOL critical clean
Features:
- Proprietary chemical mixing manifold,
with variable valve control
- Single-pass chemistry use
- Options include ozone processing (piranha
replacement)
Available configurations:
- Semi-automated 200mm
- Semi-automated 150mm
- Semi-automated 125mm
- Semi-automated 100mm
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